5

Plasma etching of Si and SiO2 in SF6–O2 mixtures

Year:
1981
Language:
english
File:
PDF, 653 KB
english, 1981
39

Computer languages and security

Year:
2002
Language:
english
File:
PDF, 53 KB
english, 2002
50

Plasma Processes and Polymers

Year:
2004
Language:
english
File:
PDF, 42 KB
english, 2004